High Purity Methyltrichlorosilane

High Purity Methyltrichlorosilane (CH₃SiCl₃, CAS 75-79-6) is a colorless, fuming liquid that reacts violently with moisture, releasing hydrogen chloride. Boiling at 66.1–66.4 °C, it is freely soluble in anhydrous organic solvents. As a key intermediate in the organosilicon industry, high-purity MTS is widely used for producing methyl silicone resins, silane coupling agents (e.g., methyltrimethoxysilane), CVD precursor for semiconductor and SiC thin films, and SiO₂ cladding deposition in optical fiber preforms. Available in industrial grade (≥99.0%) and high-purity grade (≥99.9%). Classified as water-reactive and corrosive (UN 2985, Class 4.3+8, PG II); must be handled under dry nitrogen protection, strictly isolated from water, alcohols, and bases.

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Product Introduction

Zouping Jinxing Chemical Co., Ltd. is one of the leading manufacturers and suppliers of high purity methyltrichlorosilane in China. If you're going to wholesale bulk high purity methyltrichlorosilane made in China, welcome to get free sample from our factory. All customized products are with high quality and low price.

Basic physical properties

Appearance: Methyltrichlorosilane is a colorless, transparent, and highly volatile liquid that fumes in moist air.
Boiling point: 66.4°C; Melting point: −77.8°C; Density: 1.27–1.28 g/cm³ (25°C)
Flash point: −9°C (closed cup), Flammable Liquid Category 2; Explosive limits: 7.6%–20% (v/v)
Vapor pressure: ~13.3 kPa at 20°C, ~232 mmHg at 25°C (highly volatile)
Hydrolysis: Reacts violently with water/alcohols → methylsilanetriol + HCl; condenses to form polysiloxanes; incompatible with water, alcohols, amines, bases, and strong oxidizing agents

Special Applications of High-Purity MTS

SiC Epitaxy and Ceramic CVD: MTS serves as a key silicon source precursor for depositing SiC thin films and low-k layers; metal impurities can directly contaminate wafer channels.
Electronic Packaging and Passivation: Silanization-based surface passivation of semiconductor substrates and silicon-containing passivation layers.
High-Purity Fumed Silica: Nano-SiO₂ reinforcing fillers produced via high-temperature hydrolysis in an oxy-hydrogen flame; impurity levels determine the filler's electrical properties.
Precision Cross-linked Silicone Materials: Electronic adhesives and heat-resistant aerospace silicone resins; hydrolysis must not generate ionic contamination.

FAQ

Q: Toxicity and Occupational Health

A: Oral LD₅₀ in rats is approximately 5660 mg/kg (moderately toxic), but the primary risk arises from vapors or hydrolysis-generated HCl;

Inhalation causes laryngospasm and pulmonary edema (delayed onset); causes severe corrosion to eyes and skin (Skin Corr. 1B / Eye Dam. 1);

GHS: Danger; H225 (highly flammable) + H260/H261 (releases flammable gases in contact with water) + H314 (causes severe corrosion) + H330 (fatal if inhaled; some manufacturers) + H335 (respiratory irritation);

Not classified as carcinogenic by IARC, though long-term exposure to HCl causes dental erosion and chronic bronchitis.

Q: Handling and Storage of High-Purity Grades

A: Fully sealed stainless steel/PTFE system with nitrogen blanketing (≤1 ppm O₂/H₂O); material transfer performed in a dry room (RH <5%) or glovebox; PPE: Butyl rubber gloves, acid-resistant face shield, and chemical-resistant suit; for spill response: Level A chemical-resistant suit and SCBA; Storage: Keep original containers nitrogen-blanketed, refrigerated at 2–8°C, and protected from light; do not leave opened containers standing for extended periods; keep strictly isolated from water, alcohols, amines, bases, and strong oxidizing agents; Spills: Absorb with dry sand or vermiculite; do not flush with water (releases HCl); neutralize off-gases remotely using alkaline solution; Firefighting: Dry powder, CO₂, or dry sand; do not use water or foam.

Q: Must-Check Items for Procurement COAs (Focus on High-Purity Grades)

A: Assay (GC) ≥99.9%; key impurities: SiCl₄, HSiCl₃, Me₂SiCl₂, Me₃SiCl, and free HCl; Moisture (Karl Fischer) ≤10 ppm; Metal ions: Na, K, Fe, Cu, Al, Cr, Ni ≤1 ppm each (Electronic grade ≤100 ppb); Particle count (if liquid phase): ≥0.2 μm particle count; Packaging: Passivated steel cylinders or PE-lined steel drums; nitrogen-blanketed with pressure certification; traceable batch numbers; Documentation included: Electronic-grade SDS (UN 1250), specialty gas/hazardous chemical qualifications, and ICP-MS report.

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Trichlorosilane

Silicon Tetrachloride