Chlorosilane

Chlorosilane (Monochlorosilane, SiH₃Cl, CAS 13465-78-6) is a colorless, pyrophoric gas with a pungent, irritating odor. Boiling at -30.4 °C and igniting spontaneously on contact with air (autoignition <20 °C), it is one of the most reactive members of the chlorosilane family. Freely soluble in carbon tetrachloride, carbon disulfide, ether, and THF, it hydrolyzes violently with moisture to release hydrogen chloride and flammable hydrogen gas. As a critical silicon-source precursor in CVD processes, chlorosilane is widely used for epitaxial silicon wafer growth, polysilicon thin-film deposition, SiC film fabrication for power devices, and the synthesis of organosilicon monomers (silicone oils, rubbers, resins, coupling agents). Classified as water-reactive, pyrophoric, and highly toxic (UN 2986, Class 4.3+2.3, PG I); handle only in sealed cylinders under dry inert atmosphere, strictly isolated from air, moisture, and combustibles.

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Product Introduction

Zouping Jinxing Chemical Co., Ltd. is one of the leading manufacturers and suppliers of chlorosilane in China. If you're going to wholesale bulk chlorosilane made in China, welcome to get free sample from our factory. All customized products are with high quality and low price.

Main Classifications and Varieties

Inorganic chlorosilanes-such as trichlorosilane (SiHCl₃) and silicon tetrachloride (SiCl₄)-are core raw materials for the production of solar-grade and electronic-grade polysilicon. Organochlorosilanes-such as methylchlorosilanes and trimethylchlorosilanes-contain carbon-silicon bonds or hydrocarbon groups and serve as the fundamental building blocks for silicone chemicals (such as silicone oils and silicone rubbers).

Key physical and chemical properties

Physical State: Chlorosilanes are mostly volatile liquids or gases that form a smoke-like mist upon contact with air.

Subsequent Reactions: Reacts immediately with water or alcohols, releasing large amounts of hydrogen chloride gas.

Hazards: Mostly flammable; vapors are heavier than air and can flow along the ground, potentially causing flashback fires from a distance.

Key Industrial Applications

Polysilicon production: Serves as the primary silicon source for manufacturing semiconductor epitaxial wafers and solar panels.

Silicone synthesis: Chlorosilanes are used in the synthesis of silicone resins, sealants, and coupling agents.

Chemical synthesis and protection: Acts as a protective reagent or surface treatment agent in applications such as fine chemical synthesis.

FAQ

Q: Safety red line

A: Strictly no water: Do not flush leaks with water; use dry sand, vermiculite, or inert absorbent materials instead; neutralize HCl off-gas with alkaline solutions (lime/soda ash). Moisture prevention & nitrogen blanketing: Purge the system with N₂ or He to remove moisture before startup; maintain residual pressure during shutdown to prevent back-siphoning. Standard PPE: Level A chemical-protective suit + SCBA (for gas); butyl rubber gloves + face mask + acid-resistant suit (for liquid); bare skin exposure risks burns and frostbite. Firefighting: Use dry chemical, CO₂, or sand/soil; do not use direct water streams (causes splashing and HCl release); for gas cylinders, cool the container and cut off the gas source. Health monitoring: HCl exposure may not cause immediate severe symptoms (e.g., sore throat/cough), but delayed pulmonary edema can occur (after several hours); medical observation for ≥24 hours is required following exposure.

Q: What are the main categories?

A: Categorized into two main groups based on substituents- Inorganic chlorosilanes (silicon source gases/liquids) SiCl₄ Silicon tetrachloride HSiCl₃ Trichlorosilane (TCS) H₂SiCl₂ Dichlorosilane (DCS) H₃SiCl Monochlorosilane (MCS; less common) Organochlorosilanes (silicone monomers) MeSiCl₃ Methyltrichlorosilane Me₂SiCl₂ Dimethyldichlorosilane (DMDCS; primary monomer for silicone rubber) Me₃SiCl Trimethylchlorosilane (protecting group reagent) PhSiCl₃ Phenyltrichlorosilane (which you asked about earlier) ViSiCl₃ Vinyltrichlorosilane

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