Dichlorosilane
Zouping Jinxing Chemical Co., Ltd. is one of the leading manufacturers and suppliers of dichlorosilane in China. If you're going to wholesale bulk dichlorosilane made in China, welcome to get free sample from our factory. All customized products are with high quality and low price.
Basic properties
At room temperature and pressure:Dichlorosilane is a colorless gas with a distinctive, suffocating odor; it has a boiling point of 8.3°C and a melting point of -122°C, meaning it can liquefy at slightly below room temperature; it is typically stored in cylinders as a pressurized liquefied gas.
Relative density (air=1) ≈ 3.5, heavier than air; liquid density approximately 1.26 g/cm³. Extremely flammable and spontaneously combustible: explosion limits 4.1%–99% (by volume), auto-ignition temperature approximately 55–100℃ (literature values vary; GHS standard H250 spontaneously combustible gas); leaks may ignite without an open flame.
Violent hydrolysis upon contact with water/humid air: SiH₂Cl₂ + H₂O → SiH₂O (oligomery forms siloxane) + 2HCl instantly produces white fumes (hydrochloric acid mist), which is its main mechanism of causing harm. It is soluble in organic solvents such as benzene and ether, but insoluble in water (it actually reacts). Its chemical reactivity is between silane (SiH₄) and trichlorosilane (SiHCl₃): it has a high silicon content, a lower deposition temperature than SiHCl₃, and is easier to control than pure silane.
Main uses
Semiconductor CVD / Epitaxial Silicon Source (Most Important)
Long reaction with NH₃ in LPCVD: Silicon nitride (Si₃N₄) passivation/isolation film: 3SiH₂Cl₂ + 4NH₃ → Si₃N₄ + 6NH₄Cl
Epitaphing: Single-crystal silicon layer, polycrystalline silicon, SiO₂, SiC film; used in advanced logic/3D NAND/DRAM processes
Compared to trichlorosilane: Lower deposition temperature (approximately 600–800℃), less temperature-sensitive deposition rate, speed can be controlled by adjusting the DCS concentration in the carrier gas
Photovoltaics: N-type cell passivation film, polycrystalline silicon thin film deposition
Organosilicon and Specialty Materials: Preparation of polysilazane, silicon-based precursors, silicone rubber/silicone resin intermediates; Grignard reaction to introduce silicon-based materials
Safety and Toxicology
GHS Labels: H220 Extremely flammable gas / H250 Spontaneous combustion / H314 Skin corrosion / H330 Fatal inhalation; UN 2189, Toxic gas + flammable gas
Health hazards mainly come from the hydrolysis product HCl: inhalation causes coughing, laryngospasm, pneumonia, and pulmonary edema; eye contact can cause burns and blindness; skin contact with the liquid can cause cold burns + chemical burns, and ulcers that are difficult to heal.
Dichlorosilane contains Si–H bonds and exhibits reducing properties and pyrophoricity; it reacts vigorously with halogens, strong oxidizing agents, strong bases, and alcohols.
Operation: Dedicated toxic gas cylinder cabinet, nitrogen purging, double-door replacement, leak detection (HCl + flammable), water-free fire extinguishing (only source cutoff + inert gas dilution/dry powder), personnel must wear self-contained breathing apparatus + fully enclosed chemical protective clothing.
FAQ
Q: Key Points for Handling and Storage
A: Fully enclosed stainless steel piping system + pressure reducing valve + flashback arrestor + leak detection alarm (HCl/combustible); open-vessel operations using glassware are prohibited.
Gas cylinders must be stored in a fire- and explosion-proof room (cool, ventilated, protected from rain and sunlight, and grounded), secured in an upright position, and maintained with residual pressure.
PPE: Leak response requires Level A chemical-protective suits, SCBA, and butyl rubber gloves; routine inspections require half-face respirators (with HCl cartridges), cold-resistant gloves, and safety goggles.
Firefighting (water prohibited): Use dry chemical or CO₂ for small fires; for large leaks, shut off the gas source and allow the fire to burn out-direct water streams are strictly prohibited (as they cause violent release of HCl and H₂, potentially leading to an explosion).
Leak isolation radius (ERG Guide 119): Initial isolation 100 m; fire isolation 1,600 m.
Q: What are the chemical properties of dichlorosilane?
A: Undergoes vigorous hydrolysis upon contact with water or moist air (SiH₂Cl₂ + 2H₂O → SiO₂ + 2HCl + H₂↑), releasing white HCl fumes, hydrogen gas, and heat-the heat generated can ignite the substance itself; May spontaneously ignite in air (a characteristic property of chlorosilane hydrides); leaks result in white fumes and flames; Reacts violently with alcohols, amines, bases, and strong oxidizing agents; corrodes steel, aluminum, and zinc in the presence of water; Thermal decomposition produces HCl and SiOₓ fumes/dust.
Q: Toxicity and Occupational Health
A: Fatal if inhaled: Rat 4-hour LC₅₀ approx. 144–157 ppm; highly corrosive to eyes, skin, and respiratory tract, causing severe burns and pulmonary edema (symptoms may be delayed by several hours); Liquid contact with skin/eyes: Causes chemical burns and frostbite (due to rapid vaporization and heat absorption); No independent IARC carcinogenicity classification, but HCl vapors cause irreversible lung damage; Occupational exposure limits: No TLV established by ACGIH/NIOSH; based on analogy to "toxic gas + HCl," workplace monitoring levels should be <1 ppm; GHS Labeling: Danger; H220 (Extremely flammable gas), H280 (Gas under pressure), H314 (Causes severe skin burns and eye damage), H331 (Toxic if inhaled).
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